Semiconductor Cleanroom Daily Inspection and Contamination Control Checklist
This checklist ensures semiconductor cleanroom operations comply with ISO 14644-1 Cleanrooms and Associated Controlled Environments, SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and OSHA chemical exposure standards for semiconductor fab processes. Designed for cleanroom facility managers and process engineers.
- Industry: Semiconductor / Electronics Manufacturing
- Frequency: Daily / Per shift
- Estimated Time: 25-35 minutes
- Role: Cleanroom Facility Manager / Process Engineer
- Total Items: 23
- Compliance: ISO 14644-1 Classification of Air Cleanliness by Particle Concentration, SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, OSHA 29 CFR 1910.1000 Toxic and Hazardous Substances (semiconductor chemical exposure), NFPA 318 Standard for the Protection of Semiconductor Fabrication Facilities
HVAC, Airflow, and Particle Counts
Cleanroom airflow and particulate control.
- Fan filter units (FFUs) operational with no alarms?
- Cleanroom pressure differential positive relative to adjacent areas?
- Particle counts within ISO class limit for this cleanroom?
- Temperature and humidity within specification (typically 68-72F, 40-50% RH)?
Gowning and Personnel Compliance
Cleanroom gowning protocol compliance.
- All personnel in fully compliant cleanroom gowning (coverall, hood, gloves, booties, mask)?
- Gowning inspection conducted at entry for new personnel?
- No prohibited cosmetics, jewelry, or personal items brought into cleanroom?
- No damaged or visibly contaminated gowning items worn in cleanroom?
Chemical and Gas Safety
Chemical handling and gas monitoring.
- Bulk gas and process gas monitoring system showing no alarms?
- Chemical storage cabinets vented and chemical containers properly labeled?
- Emergency eyewash stations accessible and weekly flushing logged?
- Chemical-resistant PPE available for wet bench and chemical handling?
Equipment and Tool Status
Process equipment alarms and maintenance status.
- No unacknowledged equipment alarms on process tools?
- Wet benches clean and drain systems functional?
- Ion implant or diffusion furnace - no radiation alarm active?
- Etch and CVD chambers - exhaust scrubbers operational?
Contamination Control and Housekeeping
Cleanroom contamination control procedures.
- Daily wipe-down of work surfaces with IPA or approved cleanroom cleaner completed?
- Wafers/substrates handled only in approved carriers with no bare-hand contact?
- No cardboard, wood, or particle-generating materials brought into cleanroom?
Safety Systems and Emergency
Emergency systems and evacuation readiness.
- Emergency gas and chemical shutoffs (EPO) accessible and labeled?
- Emergency drench showers unobstructed and last tested within required interval?
- Evacuation routes posted and clear?
- Contamination events, equipment issues, or safety findings
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Why Use This Semiconductor Cleanroom Daily Inspection and Contamination Control Checklist?
This semiconductor cleanroom daily inspection and contamination control checklist helps semiconductor / electronics manufacturing teams maintain compliance and operational excellence. Designed for cleanroom facility manager / process engineer professionals, this checklist covers 23 critical inspection points across 6 sections. Recommended frequency: daily / per shift.
Ensures compliance with ISO 14644-1 Classification of Air Cleanliness by Particle Concentration, SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, OSHA 29 CFR 1910.1000 Toxic and Hazardous Substances (semiconductor chemical exposure), NFPA 318 Standard for the Protection of Semiconductor Fabrication Facilities. Regulatory-aligned for audit readiness and inspection documentation.
Frequently Asked Questions
What does the Semiconductor Cleanroom Daily Inspection and Contamination Control Checklist cover?
This checklist covers 23 inspection items across 6 sections: HVAC, Airflow, and Particle Counts, Gowning and Personnel Compliance, Chemical and Gas Safety, Equipment and Tool Status, Contamination Control and Housekeeping, Safety Systems and Emergency. It is designed for semiconductor / electronics manufacturing operations and compliance.
How often should this checklist be completed?
This checklist should be completed daily / per shift. Each completion takes approximately 25-35 minutes.
Who should use this Semiconductor Cleanroom Daily Inspection and Contamination Control Checklist?
This checklist is designed for Cleanroom Facility Manager / Process Engineer professionals in the semiconductor / electronics manufacturing industry. It can be used for self-assessments, team audits, and regulatory compliance documentation.
Can I download this checklist as a PDF?
Yes, this checklist is available as a free PDF download. You can also use it digitally in the POPProbe mobile app for real-time data capture, photo documentation, and automatic reporting.